کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1507539 | 1511059 | 2012 | 5 صفحه PDF | دانلود رایگان |
We have developed a new double-sided patterning (DSP) process that employs dilute acid (pH = 1.65) to fabricate Bi2Sr2CaCu2O8+x (Bi-2212) stacks of intrinsic Josephson junctions. These stacks, which were fabricated from a single crystal of Bi-2212, were surrounded by an acid-treated product. The critical aspect of this process is that the Bi-2212 surrounding the photoresist pattern was converted into a transparent material, BiOCl, which was connected with the Bi-2212 crystal. Consequently, this process provides a simple way to achieve DSP of the surfaces of Bi-2212 crystals. This new DSP process realizes a remarkably improved reproducibility in fabricating Bi-2212 stacks that exhibit good current–voltage characteristics with a large hysteresis and multiple branches at T = 77 K.
► BiOCl were formed by dipping Bi-2212 into dilute hydrochloric acid solution.
► Double-side process by acid solution enables fabrication of Bi-2212 IJJs.
► I–V characteristics are in agreement with those of IJJs by physical etching.
Journal: Cryogenics - Volume 52, Issues 7–9, July–September 2012, Pages 398–402