Dual function sensors for concurrent measurement of temperature and magnetic field in cryogenic applications

Dual function sensors (DFSs) for concurrent measurement of temperature and magnetic field in cryogenic applications have been developed and characterized. The DFS consists of a Ge-on-GaAs film resistance thermometer and an InSb-on-GaAs film Hall-effect magnetic field sensor combined in a single package with dimensions: 3.5 mm wide, 2.2 mm thick and 10.1 mm long. The construction and characteristics of two models of the DFSs; which are intended to provide measurements of temperature in the 1.5–400 K and 0.1–400 K ranges, and magnetic fields up to 30 T, are presented.