Optical micro-multi-racetrack resonator filter based on SOI waveguides

• We present a new design of the optical FIR filter that is based on six racetrack resonators and silicon waveguides.
• An FDTD simulation is being used to demonstrate optical pulses propagation in the filter and the filter's spectral response.
• The control over the spectral characteristics is carried out by changing the geometrical parameters of the racetrack resonators.
• The manufacturability of the filter is being demonstrated.

In this paper, we present a new design of optical Finite Impulse Response (FIR) filter based on combination of multi-racetrack resonators realized with Silicon waveguides. Numerical investigations were carried out on the spectral response of the proposed filters design, in order to obtain FIR band-pass filter around the photonic carrier wavelength of 1.55 μm. The proposed FIR filter was fabricated using electron beam lithography (EBL). The device was preliminary experimentally examined by a combination of scanning electron microscopy (SEM) and atomic force microscopy (AFM).