کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1543201 | 997471 | 2011 | 10 صفحه PDF | دانلود رایگان |
The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of ∼120 nm and a period of 507 nm were etched into the SiO2 top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1.0 × 106. The measured performance agrees very well with predictions based on coupled mode theory.
► Monolithic distributed Bragg reflector (DBR) cavities in Al2O3 channel waveguides.
► The measured grating-induced loss is 0.08 ± 0.01 dB/cm.
► The maximum grating reflectivity exceeds 99%.
► A finesse of up to 147 is obtained.
► Measured quality factors exceed 106.
Journal: Photonics and Nanostructures - Fundamentals and Applications - Volume 9, Issue 3, July 2011, Pages 225–234