Polarization manipulation in single refractive prism based holography lithography

• Polarization manipulation of multiple beams interference by using single refractive prism.
• Optimization of interference contrast by only manipulating the polarization of one beam.
• Fabrication of large area photonic crystal with pill shape atom in SU-8.

We propose theoretically and demonstrate experimentally a simple but effective strategy for polarization manipulation in single refractive prism based holographic lithography. By tuning the polarization of a single laser beam, we can obtain the pill shape interference pattern with a high-contrast where a complex optical setup and multiple polarizers are needed in the conventional holography lithography. Fabrication of pill shape two-dimensional polymer photonic crystals using one beam and one shoot holography lithography is shown as an example to support our theoretical results. This integrated polarization manipulation technique can release the crucial stability restrictions imposed on the multiple beams holography lithography.