Frequency self-tuning of ZnO nanoresonator

This paper has modeled a doubly clamped zinc oxide nanoelectromechanical resonator to investigate the self-tuning mechanism of resonant frequency based on joule heating effect. From the presented theoretical analysis, it is observed that the resonant frequencies are related to thermal expansion coefficient α, Young's modulus E, thermal conductivity k, density ρ, side length a, and length L of the nanoresonator, as well as external parameters such as input electrical power P. Clearly one of approaches to achieve tuning of resonant frequencies of the resonator is to adjust the externally applied electrical power P. We present an analytical solution and a finite element model to simulate this effect. It is found from FEM results that the first resonant frequency varies from around 44.71–110.77 MHz, as the driving voltage increasing from 0.2 V to 5.2 V. The tunability is calculated to be around 13.2 MHz/V, making the device highly applicable in the area of signal processing.

► Frequency self-tuning of a ZnO nanoresonator based on Joule heating is presented.
► Full analytical and finite element solutions for the proposed problem are described.
► Simulated frequency tuning range is from around 45–111 MHz.
► Tunability is simulated to be around 13 MHz/V.