Micro-arraying of nanostructured diatom microshells on glass substrate using ethylene-vinyl acetate copolymer and photolithography technology for fluorescence spectroscopy application

► We pattern and bond nanostructured diatom microshells array with the substrate. ► The EVA and photolithography technique are used. ► Conditions are optimized for high positioning accuracy and bonding quality. ► The compound substrate is used for sensor applications. ► The fluorescence intensity substrate provides is 2.5 times higher than normal one.