Fabrication of self-masked InP nanopillars by electron cyclotron resonance ion etching

► Self-masked Indium Phosphide (InP) nanopillars are fabricated. ► Electron cyclotron resonance (ECR) Ar+ ion irradiation techniques are used. ► TEM and PL studied reveals that these nanopillars are crystalline in nature. ► Quality of the nanopillars are comparable to that of other growth techniques.