Growth and characterization of the InN film ammonification technique

InN film was synthesized by ammoniating indium film on Si(1 1 1) substrates. The samples were analyzed by X-ray diffraction (XRD), X-ray photo-electron spectroscopy (XPS), atomic force microscopy (AFM) and transmission electron microscopy (TEM). The XRD and TEM show that nanoparticles were hexagonal InN single crystals.