Aligned ZnO nanorod arrays fabricated on Si substrate by solution deposition

Aligned ZnO nanorod arrays were fabricated by chemical solution deposition based on Si substrate which was spin coated with ZnO colloid as nucleation seeds. Their microstructures were characterized by X-ray diffraction, scanning electron microscopy, and high-resolution transmission electron microscopy. The results indicated that ZnO nanorods nucleated and grew vertically on Si substrates along the [0 0 1] direction with single-crystalline structure. The diameter of ZnO nanorods was greatly affected by the grain size of ZnO seeds. Room-temperature photoluminescence of nanorods has a strong emission band at about 384 nm.