کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1547248 | 997631 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays](/preview/png/1547248.png)
چکیده انگلیسی
A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source. The sensor consisted of the anode-sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) arrays cathode in the micro-vacuum chamber. MWNTs were grown on the silicon substrate by thermal CVD. The prototype pressure sensor had measured sensitivity of about 0.35–6.1 nA/Pa (5–550 KPa). The work suggests the potential use of CNTs-based field-emitter in microsensors such as accelerometers and tactile sensors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physica E: Low-dimensional Systems and Nanostructures - Volume 31, Issue 1, January 2006, Pages 1–4
Journal: Physica E: Low-dimensional Systems and Nanostructures - Volume 31, Issue 1, January 2006, Pages 1–4
نویسندگان
Kaiyou Qian, Ting Chen, Bingyong Yan, Yangkui Lin, Dong Xu, Zhuo Sun, Bingchu Cai,