Electron transport in thin graphite films: Influence of microfabrication processes

We experimentally investigated electron transport in thin graphite films including tens of graphene layers. The samples were fabricated by mechanical peeling of graphite, e-beam lithography, metal deposition and lift-off. For some samples, Ar-ion bombardment was carried out prior to the metal deposition to enhance the electrical transparency of the contacts. We found that the Ar-ion bombardment significantly deteriorate the samples; the electron transport changes from the semimetallic behavior to the weak-localization behavior.