Novel charge plasma based dielectric modulated impact ionization MOSFET as a biosensor for label-free detection

• A Novel CP-DIMOSFET is proposed to ease the label free detection of biomolecules.
• Low thermal budgeting due to charge plasma process.
• Simply fabricable, miniaturized, highly sensitive.
• Applicable in healthcare industry.

In this paper a charge plasma based dielectric modulated impact ionization MOSFET (CP-DIMOSFET) has been proposed for the first time to ease the label free detection of biomolecules. The concept of CP-DIMOSFET is proposed and analyzed on basis of simulated data using SILVACO ATLAS. Low thermal budgeting and thin silicon layer without any dopant implantations make the proposed structure advantageous compared to the existing MOSFET based biosensors. The results show that the proposed device is capable to detect the presence of biomolecules. Simple fabrication schemes, miniaturization, high sensitivity, dominance of dielectric modulation make the proposed biosensor a promising one that could one day revolutionize the healthcare industry.