کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1553278 | 1513223 | 2015 | 9 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Effects of phosphorus doping on the optical and electronic properties of Si-quantum-dots/SiO2 multilayer films Effects of phosphorus doping on the optical and electronic properties of Si-quantum-dots/SiO2 multilayer films](/preview/png/1553278.png)
• Phosphorus doped Si-quantum-dots/SiO2 films have been prepared.
• Carrier capture centers at the interface were filled by phosphorus doping.
• The optoelectronic properties of films were enhanced by proper doping.
Phosphorus (P) doped Si-quantum-dots/SiO2 multilayer films have been deposited by plasma enhanced chemical vapor deposition (PECVD) technique, and Si quantum dots (Si-QDs) are obtained by the following annealing treatment. Raman and transmission electron microscopy (TEM) results show that P doping prevents the growth of Si-QDs. The photoluminescence (PL) intensity can be enhanced by proper P doping, and a maximal PL intensity is obtained when the doping flow ratio of phosphine and silicane is 0.75%. The resistivity of the films is reduced by P doping, and proper doping leads two orders of magnitude lower than that of the intrinsic films. Analysis shows that proper P doping in the multilayer films could fill the carrier capture center in interface and suppress the non-radiative recombination of carriers.
Journal: Superlattices and Microstructures - Volume 78, February 2015, Pages 88–96