Influence of CHx thickness layer on the sensing properties of CHx/PS/Si structure against CO2 gas

In this work, we report a study on the influence of hydrocarbon groups (CHx) thickness layer on sensing properties of CHx/Porous Silicon (PS)/Si structures against CO2 gas. The hydrocarbon groups were deposited by plasma of methane-argon mixture. The properties of these structures are investigated by current-voltage, current-time and capacitance-voltage measurements from where a different behaviour depending on CHx layer thickness has been observed. The results show that current-voltage and impedance-voltage characteristics are modified by the gas reactivity on the CHx/PS surface. As the CHx layer thickness increases, the series resistance and the ideality factor of the structure increase. In addition, the response and recovery times of the sensor decrease with increasing the CHx thickness. Finally, the results point out the effect of CHx coating on the sensitivity of the CHx/PS/Si sensor.