کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1555050 | 1513252 | 2008 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Atomic Force Microscope nanolithography on titanium: Influence of the anodic voltage waveform on the formation of oxide nanodots
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Atomic Force Microscope nanolithography on titanium: Influence of the anodic voltage waveform on the formation of oxide nanodots Atomic Force Microscope nanolithography on titanium: Influence of the anodic voltage waveform on the formation of oxide nanodots](/preview/png/1555050.png)
چکیده انگلیسی
We investigate the effect of different voltage waveforms on the growth of titanium oxide nanodots using Atomic Force Microscope (AFM) nanolithography. The resulting oxide features are compared by taking into account the current data detected during oxidation under the application of constant and linear ramp voltages. The experimental analysis of current waveforms during oxidation upon a constant bias voltage gives quantitative criteria to reduce space charge effects. The use of ramp voltages gives higher flexibility on the control of volume and aspect ratio of oxide features by varying the duty cycle.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Superlattices and Microstructures - Volume 44, Issues 4–5, October–November 2008, Pages 670–676
Journal: Superlattices and Microstructures - Volume 44, Issues 4–5, October–November 2008, Pages 670–676
نویسندگان
Tae Young Kim, Ermanno Di Zitti, Davide Ricci, Silvano Cincotti,