Template-assisted preparation of films of transparent conductive indium tin oxide

Thin films of ITO distinguished by an accessible uniform mesoporosity providing an unhindered access to well-defined inner surface, high transparency and good electrical conductivity were prepared by a template-assisted synthesis procedure. Indium acetylacetonate serving as the source of indium oxide made it possible to slow down the crystallization of indium oxide as compared to inorganic salt precursors. The preparation procedure included the following steps: (1) slow condensation step at 100–300 ∘C in air, providing the amorphous ITO precursor with a high level of 3D-organization around the template micelles; (2) treatment in air at 450–550 ∘C necessary for the removal of the template and opening the mesoporosity; (3) treatment in nitrogen at 450 ∘C required for the improvement of the film’s conductivity.