Deposition-power-modulated optical and electrical properties of sputtering-derived HfTiOx gate dielectrics

Deposition-power-modulated optical and electrical properties of sputtering-derived HfTiOx gate dielectrics

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 649, 15 November 2015, Pages 128-134

P. Jin, G. He, M. Liu, D.Q. Xiao, J. Gao, X.F. Chen, R. Ma, J.W. Zhang, M. Zhang, Z.Q. Sun, Y.M. Liu,