Fabrication of hafnia hollow nanofibers by atomic layer deposition using electrospun nanofiber templates

► HfO2 hollow nanofibers were synthesized by ALD using electrospun nanofiber templates. ► Dimensions of the synthesized HfO2 hollow nanofibers were precisely controlled. ► HfO2 hollow nanofibers were polycrystalline with a monoclinic crystal structure. ► HfO2 was found to be almost stoichiometric with an Hf:O ratio of ∼0.51.