کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1624124 | 1516410 | 2009 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections](/preview/png/1624124.png)
چکیده انگلیسی
A bath containing alkali-metal-free chemicals was developed for electroless deposition of Co-W-P thin films on a copper substrate and an optimisation of bath compositions was made. Ammonium cobalt sulphate, ammonium tungstate and ammonium hypophosphite were used as the precursors of cobalt, tungsten and phosphorus, respectively. Dimethylamine borane and ammonium citrate were used as reducing and complexing agents, respectively. It was found that the cobalt content, film thickness and grain size increased with increase in cobalt ion concentration in the bath. Tungsten in the films increased from 1 to 6Â at.% when its concentration in the bath was increased from 0.001 to 0.009Â M. A variation of phosphorus content from 2 to 12Â at.% was made by increasing its concentration from 0.01 to 0.05Â M. It was found that the deposition rate decreased with increasing citrate ion concentration. Amorphous films were obtained when the combined amount of phosphorus and tungsten exceeded 12Â at.% in the films. The crystalline film had small spherical crystallites with diameter less than 40Â nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 467, Issues 1â2, 7 January 2009, Pages 370-375
Journal: Journal of Alloys and Compounds - Volume 467, Issues 1â2, 7 January 2009, Pages 370-375
نویسندگان
S.M.S.I. Dulal, Tae Ho Kim, Hyongmoo Rhee, Joon Yong Sung, Chang-Koo Kim,