کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
173314 458587 2010 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
On-line multivariate statistical monitoring of batch processes using Gaussian mixture model
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
On-line multivariate statistical monitoring of batch processes using Gaussian mixture model
چکیده انگلیسی

This paper considers multivariate statistical monitoring of batch manufacturing processes. It is known that conventional monitoring approaches, e.g. principal component analysis (PCA), are not applicable when the normal operating conditions of the process cannot be sufficiently represented by a multivariate Gaussian distribution. To address this issue, Gaussian mixture model (GMM) has been proposed to estimate the probability density function (pdf) of the process nominal data, with improved monitoring results having been reported for continuous processes. This paper extends the application of GMM to on-line monitoring of batch processes. Furthermore, a method of contribution analysis is presented to identify the variables that are responsible for the onset of process fault. The proposed method is demonstrated through its application to a batch semiconductor etch process.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computers & Chemical Engineering - Volume 34, Issue 4, 5 April 2010, Pages 500–507
نویسندگان
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