Influence of crucible and coil geometry on the induction heating process in Czochralski crystal growth system

A 2D finite element method is employed to compute electromagnetic field as well as volumetric heat generation in an oxide Czochralski crystal growth system considering different shapes of metal crucible and different configurations of induction coil. The results show undeniable roles of crucible corner shape and setup of the RF-coil under the crucible in producing desirable heat pattern and avoiding common issues in the CZ growth systems.