High power (>5 W) λ∼9.6 μm tapered quantum cascade lasers grown by OMVPE

► AlInAs/GaInAs/InP superlattice growth was optimized for quantum cascade lasers. ► In surface segregation can be significant in superlattices with ultra-thin layer thickness. ► In surface segregation occurs during growth of quantum cascade lasers. ► High-peak power of 5.3 W was measured for tapered quantum cascade lasers.