کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1797413 1023789 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A simple model explaining the preferential (1 0 0) orientation of silicon thin films made by aluminum-induced layer exchange
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
A simple model explaining the preferential (1 0 0) orientation of silicon thin films made by aluminum-induced layer exchange
چکیده انگلیسی

In the aluminum-induced layer exchange process polycrystalline silicon thin films can be formed on foreign substrates at low temperatures. These films exhibit a preferential (1 0 0) crystal orientation, that depends on the annealing temperature. Further, the preferential orientation is sensitive to the nature of the Al oxide layer between the Si and the Al. A model based on preferential nucleation is presented which elucidates a possible origin of the preferential (1 0 0) orientation and its sensitivity to temperature and the aluminum oxide interlayer.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 287, Issue 2, 25 January 2006, Pages 423–427
نویسندگان
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