SIMS-depth profile and microstructure studies of Ti-diffused Mg-doped near-stoichiometric lithium niobate waveguide

Ti-diffused planer waveguides have been fabricated on pure and Mg-doped near stoichiometric lithium niobate (SLN). Secondary ion mass spectroscopy method was applied to study the Ti diffusion in 1 mol% Mg-doped Z-cut SLN crystal. 100 nm Ti film has been deposited on LN substrate by e-beam evaporation at room temperature. Diffusion constant value for Mg-doped SLN is lower (1.84×10−13 cm−2/s) than that of pure SLN. Mg-doped CLN also possesses low diffusion constant value of 1.27×10−13 cm−2/s due to higher doping concentration of Mg (5 mol%). AFM topographic observation reveals that Mg-doped SLN shows lower surface roughness than Mg-doped CLN. The roughness (peak to valley) of the Ti-diffused Mg:SLN is 20 nm compared to 62 nm for the congruent LN waveguide. These features make Mg:SLN highly attractive for the fabrication of efficient waveguides.