Effect of quantity of spraying solution on the properties of spray deposited fluorine doped tin oxide thin films

Thin films of fluorine doped tin oxide (F:SnO2) have been prepared using cost effective spray pyrolysis technique. Thin films of different thickness are obtained by varying quantity of spraying solution. Films of up to 1071 nm thickness have been deposited at a maximum growth rate of 3 nm/s. The structural, optical and electrical properties of these films have been studied. It is found that the films are tetragonal with (2 0 0) orientation. The optical study showed that the films have a bandgap of 4.15 eV. The films shows 75% transmission at 550 nm leading to a factor figure of merit of 1.25–1.7. It is found that the films show n-type conductivity with the lowest resistivity of 3.91×10−4 Ω cm, carrier density of 4.71×1020 cm−3 and mobility around 11 cm2 V−1 s−1.