Studies and correlation among the structural, optical and electrical parameters of spray-deposited tin oxide (SnO2) thin films with different substrate temperatures

Thin films of tin oxide (SnO2) have been grown by using a simple and economical spray pyrolysis technique. The deposition temperature was optimized to 450 °C, while the concentration and quantity of the solution were kept fixed at 2 M and 20 ml, respectively. X-ray diffraction patterns (XRD) studies reveal that the material deposited is polycrystalline SnO2 having primitive tetragonal structure. The lattice parameters, grain size, microstrain and dislocation densities were calculated and correlated with the substrate temperature. The transmission spectra showed a sharp decrease in transmission at the absorption edge and a good form of interference pattern. The figure of merit has been calculated from transmission spectra. Low sheet resistance ∼16.03 Ω/sq cm and high visible transmission (∼86%) were obtained when the films were deposited at the substrate temperature of 450 °C. From electrical measurements, the resistivity was found to be 11.5×10−4 Ω cm, while the carrier concentration was calculated to be 8.81×1021 cm−3.