Newfound capability of focused ion beam patterning guided anodization

This study addresses focused ion beam (FIB) patterning guidance effect on the nanopore development during the subsequent anodization on uneven surfaces. Different shape, uneven features are first created on aluminum surfaces. After that, hexagonally arranged nanoconcaves with different inter-concave distances are patterned across the surfaces. The pore development in different anodization electrolytes as well as with different interpore distances and feature surface curvatures are studied. The results show that FIB guided anodization can produce ordered nanopore arrays on various uneven surfaces. In the nanopore depth direction, pores grow perpendicularly to the tangential direction of the surface, which leads to pore splitting or termination based on the surface curvature.

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► FIB patterning on pore growth during uneven surface anodization is studied.
► The technique produces ordered nanopore arrays on various uneven surfaces.
► Electrolyte, interpore distance, and surface curvature direct pore growth.
► Pores grow perpendicularly to the tangential direction of the surface.
► Pore splitting or termination occurs in the depth direction.