کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
191633 459725 2010 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of nanopatterned metal layers on silicon by nanoindentation/nanoscratching and electrodeposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
Fabrication of nanopatterned metal layers on silicon by nanoindentation/nanoscratching and electrodeposition
چکیده انگلیسی

The present work illustrates a novel approach for the maskless and resistless fabrication of nanopatterned metal layers on Si substrates, based on the combination of nanomechanical surface modification techniques (such as nanoindentation and nanoscratching) and electrodeposition. Single crystal (1 0 0) n-doped Si substrates were first cleaned from native oxide. Nanoindentation and nanoscratching were then used to locally change the substrate microstructure and create regions with reduced electrical conductivity. The substrates were finally mounted as cathode electrodes in a three-electrode electrochemical cell to potentiostatically deposit a Ni layer. Electrodeposition was prevented in regions with modified microstructure, enabling the formation of a patterned Ni layer. The fabrication of several patterns including continuous Ni lines of 200 nm width and several microns length was obtained.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Electrochimica Acta - Volume 55, Issue 9, 30 March 2010, Pages 3355–3360
نویسندگان
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