کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
193059 459760 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of chemical additives on the surface reactivity of Si in KOH solution
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
Influence of chemical additives on the surface reactivity of Si in KOH solution
چکیده انگلیسی

It is known that the electrochemistry of silicon in alkaline solution is closely linked to the anisotropic etching of the semiconductor. In this work the influence of two commonly used additives, hydrogen peroxide and isopropyl alcohol, on the surface chemistry of silicon in KOH solution was investigated by electrochemical methods. The results allow us to draw conclusions regarding the role of the additives in the chemical and electrochemical reactions.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Electrochimica Acta - Volume 54, Issue 13, 1 May 2009, Pages 3526–3531
نویسندگان
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