Lithographic sonication patterning of large area GaN nanopillar forests grown on a Si substrate

Lithographic sonication patterning of large area GaN nanopillar forests grown on a Si substrate

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 181, 5 September 2017, Pages 43-46

J.C. Weber, M.D. Brubaker, T.M. Wallis, K.A. Bertness,