Enhanced electrical characteristics of FinFET by rapid-thermal-and-laser annealing with suitable power

Enhanced electrical characteristics of FinFET by rapid-thermal-and-laser annealing with suitable power

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 178, 25 June 2017, Pages 56-60

Dun-Bao Ruan, Kuei-Shu Chang-Liao, Yan-Lin Li, Hao-Ting Feng, Yi-Wen Hsu, Chin-Hsiu Huang, Shang-Fu Tsai, Meng-Ying Yang,