کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
4970895 1450307 2017 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics
چکیده انگلیسی


- The influence of contact photolithography on a nanocomposite dielectric was analyzed.
- The electrical characteristics of DNTT-based TFTs were evaluated.
- Negligible hysteretic behavior of the TFT was achieved by using a sacrificial layer.
- Inverter circuits were integrated and electrically characterized.
- Maximum process temperature of 120 °C

In this article we present an integration technique for low-voltage DNTT-based TFTs for flexible electronic applications. Therefore, a high-k nanocomposite combining the flexibility of its polymeric matrix and the high permittivity of the incorporated inorganic material was used as gate dielectric layer. The influence of a conventional photolithography process upon the dielectric layer is analyzed regarding electrical instabilities in the device characteristics. The impact of an implemented sacrificial layer to reduce chemical stress to the insulating film during photolithography is evaluated. Furthermore, first inverter circuits were integrated and electrically characterized. Additionally, the implementation of this sacrificial layer can be used for future complementary circuit design.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 174, 25 April 2017, Pages 35-39
نویسندگان
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