Impact of surface preparation for n-type Si:P and p-type SiGe:B semiconductors on low resistance silicide contacts

Impact of surface preparation for n-type Si:P and p-type SiGe:B semiconductors on low resistance silicide contacts

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 173, 5 April 2017, Pages 22-26

A. Carr, B. Peethala, M. Raymond, P. Adusumilli, V. Kamineni, C. Niu, A. Arceo De La Pena, D.F. Canaperi, S. Siddiqui,