Effect of low energy proton beam irradiation on structural and electrical properties of ZnO:Al thin films

In this study, we report the structural modification and change in electrical behaviour of aluminium doped zinc oxide by low energy (100 keV) proton irradiation. Aluminium doped zinc oxide films were deposited using DC magnetron sputtering and then annealed for a short duration at 600 °C before irradiation. Structural and defect studies of the films carried out using XRD and Raman spectroscopy. It suggests that the crystalline ordering increases at higher fluences due to annealing of defects in the film. The increase in crystallinity at higher fluences decreases the grain boundary scattering and causes low resistivity. There is no significant change in carrier concentration after the irradiation, however the mobility and resistivity of the Al doped ZnO films change with proton irradiated fluences. The development of defect due to irradiation has been confirmed through Raman spectroscopic studies. The increase in activation energy of particles has been suggested by low energy proton irradiations at higher fluences in the annealed Al doped ZnO thin films. The uniform particle distribution increases with fluences of the irradiation that may be helpful for spintronics and sensor device technology.