Theoretical study on the SiH4−nCln (n = 0-4) reaction mechanisms for polysilicon production process

Theoretical study on the SiH4−nCln (n = 0-4) reaction mechanisms for polysilicon production process

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computational and Theoretical Chemistry - Volume 1035, 1 May 2014, Pages 60-67

Yi Ran, Jing-Bo Wang, Yong-Xiang Yin,