A study on three-dimensional electrode arrays fabricated by PolyMUMPs® for AC electro-osmotic pumping

This paper presents four three-dimensional (3D) micro-electrode arrays for pumping liquid by utilizing AC electro-osmosis (ACEO) mechanism. Fabricated by using PolyMUMPs® process, these electrode arrays are made of polysilicon and subject to a surface oxide layer, which does not exist on conventional gold electrodes. An ACEO finite element model (FEM) accounting for the surface oxide on polysilicon electrodes is integrated in this work. The relationship of the velocity of driven liquid vs. the frequency of the electrical driving signal is obtained for the four electrode arrays through simulation and testing. Impacts of the electrode configuration and surface oxide are analyzed by comparing simulation and experimental results.

This paper presents four three-dimensional (3D) micro-electrode arrays for pumping liquid by utilizing AC electro-osmosis (ACEO) mechanism. Fabricated by using PolyMUMPs® process, these electrode arrays are made of polysilicon and subject to a surface oxide layer, which does not exist on conventional gold electrodes. An ACEO finite element model (FEM) accounting for the surface oxide on polysilicon electrodes is integrated in this work. The relationship of the velocity of driven liquid vs. the frequency of the electrical driving signal is obtained for the four electrode arrays through simulation and testing. Impacts of the electrode configuration and surface oxide are analyzed by comparing simulation and experimental results.Figure optionsDownload as PowerPoint slide