Quantitative compositional analysis of organic thin films using transmission NEXAFS spectroscopy in an X-ray microscope

► Common sources of error in transmission NEXAFS spectra in a STXM identified and shown to be significant. ► Three facile methods to characterize and eliminate or limit errors are detailed. ► Appropriate spectra processing methods are discussed and demonstrated. ► Quantitative compositional analysis of organic thin films is conducted and shown to be robust.