کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
539648 | 871266 | 2011 | 4 صفحه PDF | دانلود رایگان |

Focused Ion Beam (FIB) technology has become an indispensable enabling tool for micro nano fabrications. One important application is to use FIB for patterning conducting nanowires of metals down to a few tens of nanometre for applications such as interconnects, heaters and temperature nanosensors. A series of experiments on Au nanowires fabricated by FIB on SixNy membrane show that nanowires with width ⩽50 nm have structural instabilities. These are liquid like and first show-up as undulations in nanowire width with clearly defined wave lengths. For smaller widths (∼20 nm) the instabilities grow and the wires eventually break-up into spherical balls. Further experiments show that the nanowires can be made stable to smaller widths by the use of a Cr underlayer to enhance surface wetting. The observed behaviour is due to the Rayleigh-Plateau instability which occurs for systems in which surface energy dominates.
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Journal: Microelectronic Engineering - Volume 88, Issue 9, September 2011, Pages 2840–2843