Electronic structure of fluorinated diamond-like carbon thin films as a function of annealing temperature using photoelectron spectroscopy

► Photoelectron study of fluorinated diamond-like carbon thin films was performed. ► The photon energy dependence of the spectra in the valence band was measured. ► The orbital components of the spectra in the valence band were clarified. ► The temperature dependence of the spectra in the F and C 1s levels was also measured. ► The chemical composition and components of the thin films were determined.