On the choice of a regulator for the extraction of depth profiles from ARXPS data obtained on plasma-treated polystyrene

Regularized oxygen concentration depth profiles were extracted from ARXPS data obtained on a plasma-oxidized polystyrene sample, using a variety of regulators and over a wide range of values for the regularization parameter. The plausibility of the profiles obtained was assessed with respect to strong and weak criteria based on a priori considerations. It was found that the most plausible results were obtained with regulators based upon the slopes or the curvatures exhibited in the profile.