EPES information depth for an overlayer/substrate system with a diffuse interface

The information depth (ID) of elastic peak electron spectroscopy (EPES) was considered for an overlayer/substrate system with a diffuse interface. The interface was assumed to have an exponential concentration profile. The paradox previously found by Zommer and Jablonski for the Rh/Al and Al/Rh systems with sharp interfaces also occurs for these systems with diffuse interfaces. We compared IDs for diffuse and sharp interfaces. Deviations between the IDs depend on the interface width, overlayer thickness, and selected system for a given primary energy (here 2000 eV). The deviations for the Rh/Al and Al/Rh systems differ profoundly. These results are of importance when interpreting EPES measurements of layered system.