A matrix approach to resolution enhancement of XPS spectra by a modified maximum entropy method

The algorithms work by modelling the convolution process using simple matrix algebra. The deconvolution can be carried out in about a minute on a modern PC. These algorithms have been applied to the poorly resolved C1s region of a metal phthalocyanine film, and the resulting enhancement allows previously unresolved structure to be observed without the need to fit assumed peak shapes to the measured spectrum.