کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
539748 | 1450393 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of mold shape and sidewall roughness on nanoimprint by molecular dynamics simulation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper investigates the effects of mold shape and sidewall roughness on the formation of atomic-scale structure in a metal direct imprinting process by utilizing molecular dynamics (MD) simulation. Different types of tapered molds and different roughness are discussed in this study. The relationships between the imprinting force and the imprinting depth are acquired during the entire process. The simulation results show that with increasing taper angle θ, the imprinting force required is lower, and that different formation mechanisms can be identified. The geometries of the imprint patterns are affected by sidewall roughness.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 87, Issues 5–8, May–August 2010, Pages 864–868
Journal: Microelectronic Engineering - Volume 87, Issues 5–8, May–August 2010, Pages 864–868
نویسندگان
Chung Han Yao, Chih Hang Chang, Chih Wei Hsieh, Cheng Kuo Sung,