Synthesis and cathodoluminescence characterization of ZrO2:Er3+ films

Trivalent erbium doped zirconium oxide films were deposited by the ultrasonic spray pyrolysis technique. Films were deposited using zirconium tetrachloride octahydrate (ZrCl4O·8H2O) and erbium nitrate hexahydrate ((NO3)3Er·6H2O) as precursors and deionized water as solvent. The dopant concentrations in the spray solution were 1, 3, 5, 10 and 15 at% in ratio to zirconium content. The films were deposited on corning glass substrates at different temperatures from 400 up to 550 °C. Films deposited at temperatures lower than 400 °C were amorphous, however, as substrate temperatures are increased, the ZrO2 films presented a better crystallinity and showed a tetragonal phase. Cathodoluminescence (CL) emission spectra showed bands centred at 524, 544 and 655 nm associated with the electronic transition of Er3+.