Enhanced ultraviolet-visible cathodoluminescence from Ar+ beam-induced nano-patterned silicon

► Cathodoluminescence (CL) of Ar ion-induced ripple patterned porous Si in a high resolution scanning electron microscope (HRSEM). ► Patterned amorphous Si strongly luminescent compared to its non-patterned amorphous or patterned recrystallized form. ► Crest and front slope region of ripples contributes predominantly to the visible and near IR emission. ► Rear slope region contributes mostly to UV emission.