Conversion efficiency of implanted ions by confocal micro-luminescence mapping

► Conversion efficiency of implanted ions into emitting centers - statistical approach. ► Micro-luminescence mapping with open and narrow confocal aperture - comparison. ► Advantages of the confocal micro-luminescence mapping. ► Confocal micro-luminescence mapping has been applied to the Xe center in diamond. ► The conversion efficiency has been found to be about 0.28.