کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
540839 871349 2007 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Role of residual stress on crack penetration and deflection at a bimaterial interface in a 4-point bend test
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Role of residual stress on crack penetration and deflection at a bimaterial interface in a 4-point bend test
چکیده انگلیسی

The four-point bend (4PB) test has emerged as a method of choice in the semiconductor industry for obtaining bimaterial interface adhesion data. When measuring the interface adhesion using 4PB test, it is essential to obtain a crack through the interface of interest. In our previous work the effect of finite flaw size, boundary conditions and film thickness on the crack deflection or penetration at a bimaterial interface was studied, and it was determined that prior work on semi-infinite media cannot be directly used in the case of 4PB test. In this paper, we briefly discuss the origins and development of residual stress, and will expand our previous work to include the role these residual stresses play on the competition between deflection and penetration energy release rates of a bimaterial interface and the extent of which the previous assumption of two semi-infinite media can be accepted.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 84, Issue 1, January 2007, Pages 72–79
نویسندگان
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