Tin based laser-produced plasma source development for EUVL

Results are reported for tin based laser-produced plasmas (LPPs) formed from slab targets, where resonance transitions from Sn7+ to Sn13+ ions overlap to yield an unresolved transition array (UTA) in the required emission bandwidth to match available multilayered mirror reflectance characteristics. The effect of target orientation, tin concentration, and laser pulse power density on emission brightness are studied. Comparisons are made between experiment and the results of atomic structure calculations combined with a steady state plasma theory.