A low cost micro-heater for aerosol generation applications

• We disclose a low cost, rapid turn around proves for volume production of microheaters for use in aerosol generation.
• We provide qualitative data on the quality of the aerosol generated by a number of designs.
• We disclose designs for creating and mixing multicomponent aerosols using closely spaced individual heaters.

A low cost micro-heater for aerosol generation has been developed using thin film deposition, electroless metal plating and selective wet etching technology. The thermal and electrical behavior of micro-heater (MH) and micro-hot-plate (MHP) systems is reported. The microstructure of the MH consists of a free standing amorphous silicon membrane with a thin film micro-heater (Cr/Ni layer) on top. The heating element is fabricated by e-beam evaporation and solution based nickel plating. The metal pattern temperature reaches the boiling point of glycerol (290 °C) and higher. A wet etched formed reservoir storage space for the aerosol source liquid can be placed alongside or underneath the hot plate. The entire MH unit is fabricated on a thin glass coverslip. This structure and the use of a plating bath and wet etch render the device remarkably low cost (less than 18¢) as compared to other silicon technology based heaters. This MH can be integrated with gas sensors to assist pre-heating to the working temperature. The chemical release cycles are well controlled and are ideally suitable for use in medical procedures, such as drug inhalation therapy.

Glycerol aerosol generated by the low-cost micro-heater.Figure optionsDownload as PowerPoint slide